Observation
SEM
JCM-6000 (JEOL)
Mag : 10x ~ 60000x
X-ray CT machine
Xradia 520 Versa (ZEISS)
Objective lens: 5x, 10x, 20x, 50x, 100x
Max voltage : 160 kV
Max output : 10 W
Spatial resolution : 0.7 μm
Digital microscope
VHX-8000 (KEYENCE)
Mag : 0x ~ 6000x
Digital microscope
VHX-7000 (KEYENCE)
Mag : 20x ~ 6000x
Digital microscope
VHX-6000 (KEYENCE)
Mag : 20x ~ 6000x
Digital microscope
VHX-5000 (KEYENCE)
Mag : 30x ~ 5000x
Laser microscope
LEXT OLS4000 (OLYMPUS)
Objective lens: 5x, 10x, 20x, 50x, 100x
Laser: 405nm semiconductor laser
Planar resolution : 0.12 μm
Hight resolution : 0.01 μm
High speed camera
HPV-X2 (SHIMADZU)
Recording speed (frame rate) : max 10 million frames/second
Resolution : 50000 pixels
High speed camera
VW-9000 (Keyence)
Recording speed (frame rate) : max 230 000 frames/second
Resolution : max 1920 × 1440 pixels
Infrared camera
FLIR A6701
Temperature sensitivity: ＜ 20 mK
Spatial resolution: 5 µm
Field of view: 3.2 x 2.56 mm
Working distance: 30 mm
Mechanical Test
Universal testing machine
AG-100kNXplus (SHIMADZU)
Capacity : 100 kN
Crosshead speed : 0.0005 ~ 1000 mm/min
Universal testing machine
AG-5000C (SHIMADZU)
Fatigue testing machine
Survo pulser EHF-E (SHIMADZU)
Pneumatic fatigue testing system
Air Servo Mini(SHIMADZU), AC021-012
Maximum force: ±1kN
Maximum stroke: ±10mm
Applicable specimen: W6×T1.5
Fatigue testing machine
MMT-500N (SHIMADZU)
Capacity : 500 N
Small Tensile Testing Machine
MT5000DL (DEBEN)
Capacity: 5000 N
Displacement: 10 mm
Temperature: Room temperature to 525 °C
Hardness testing machine
DUH-211 (SHIMADZU)
Load range : 0.1 ~ 1961 mN
Depth resolution : 0.1 nm
Nanoindenter
iMicro Nanoindenter (KLA)
Load resolution : 3 nN
Max load : 50 mN
Depth resolution : 0.02 nm
Max temperature : 300 ℃
Measurement
Analytical balance
BM-252 (A&D)
Weight measurement range : 0.01 mg ~ 250 g
AE measurement machine
Continuous Wave Memory
Sample Prepare & Heat Treatment
Precision cutting machine
Fine cut (HEIWA TECHNICA)
Low-speed precision cutting machine
Minitom (Struers)
Resin embedding machine
SimpliMet 4000 (BUEHLER)
pressure range : 1000 ~ 4400 psi
temperature range: 50 ~ 220 ℃
Resin embedding machine
CitoVac (Struers)
Surface polisher
MA-200e (MUSASHINO DENSHI)
Rotation speed : 0 ~ 200 rpm
Surface polisher
AutoMet 250 Pro (BUEHLER)
Ion milling equipment
SVM-721 (Sanyu Electron Co., Ltd.)
Acceleration voltage: 2–8 kV (in 1 kV steps)
Beam current: up to 150 µA
Beam diameter: φ4 mm
Maximum milling rate: approximately 50 nm/min (Si substrate at 8 kV)
Working gas: Argon (Ar) gas
Maximum sample size: φ50 mm × t20.5 mm
Image furnace
RHL-E45P (ULVAC-RIKO)
Max temperature : 1400℃
Others
Calculation server
HPC5000-XBW216TS-D8 (HPC SYSTEMS)
Draft chamber
Lab.Draft700 Z7P-FL8 (AS ONE)
Temperature & humidity chamber
SH-242 (ESPEC)
Temperature range : -40 °C～+150 °C
Humidity range : 30 %～95 % RH